Mechanical Properties of Silicon Microstructures

Year of publication

2010

Authors

Ganchenkova, Maria; Nieminen, Risto M.

Organizations and authors

Aalto University

Nieminen Risto

Publication type

Publication format

Article

Parent publication type

Compilation

Article type

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A3 Book section, Chapters in research books

Publication channel information

Parent publication name

Handbook of Silicon Based MEMS Materials and Technologies

Publisher

Elsevier

Pages

179-219

ISBN

978-0-8155-1594-4

Open access

Open access in the publisher’s service

Self-archived

Other information

Fields of science

Physical sciences; Mechanical engineering; Environmental engineering; Nanotechnology

Keywords

[object Object],[object Object],[object Object]

Internationality of the publisher

Domestic

Language

English

International co-publication

Co-publication with a company

DOI

10.1016/B978-0-8155-1594-4.00011-5

The publication is included in the Ministry of Education and Culture’s Publication data collection

Yes