Reduction of molybdenum resistivity by a seed layer of Ti-W

Year of publication

1997

Authors

Franssila, Sami; Kattelus, H.; Nykänen, E.

Organizations and authors

Aalto University

Franssila Sami

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Original article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1 Journal article (refereed), original research

Publication channel information

Journal/Series

Microelectronic Engineering

Publisher

Elsevier

Volume

37/38

Pages

373-380

Open access

Open access in the publisher’s service

Self-archived

Other information

Keywords

[object Object],[object Object],[object Object],[object Object],[object Object]

Internationality of the publisher

International

Language

English

International co-publication

Co-publication with a company

The publication is included in the Ministry of Education and Culture’s Publication data collection

Yes