Atomic layer deposition of metal fluorides through oxide chemistry
Year of publication
2011
Authors
Putkonen, Matti; Szeghalmi, A; Pippel, E; Knez, Mato
Organizations and authors
Publication type
Publication format
Article
Parent publication type
Journal
Article type
Original article
Audience
ScientificPeer-reviewed
Peer-ReviewedMINEDU's publication type classification code
A1 Journal article (refereed), original researchPublication channel information
Journal
Publisher
Volume
21
Pages
14461-14465
ISSN
Publication forum
Publication forum level
3
Open access
Open access in the publisher’s service
No
Self-archived
No
Other information
Fields of science
Chemical sciences
Internationality of the publisher
International
Language
English
International co-publication
Yes
Co-publication with a company
No
DOI
10.1039/c1jm11825k
The publication is included in the Ministry of Education and Culture’s Publication data collection
Yes