Atomic layer deposition enhanced rapid dry fabrication of micromechanical devices with cryogenic deep raective ion etching

Year of publication

2007

Authors

Chekurov, Nikolai; Koskenvuori, Mika; Airaksinen, Veli-Matti; Tittonen, Ilkka

Organizations and authors

Aalto University

Tittonen Ilkka

Koskenvuori Mika

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Original article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1 Journal article (refereed), original research

Publication channel information

Journal/Series

Journal of Micromechanics and Microengineering

Publisher

Institute of Physics Publishing

Volume

Issue

Open access

Open access in the publisher’s service

Self-archived

Other information

Keywords

[object Object],[object Object],[object Object],[object Object]

Internationality of the publisher

International

Language

English

International co-publication

Co-publication with a company

The publication is included in the Ministry of Education and Culture’s Publication data collection

Yes