Surface Passivation of Al(x)Ga(1-x)As Ohmic Contacts Formation

Surface Passivation of Al(x)Ga(1-x)As Ohmic Contacts Formation

Year of publication

1994

Authors

Fischer, V.; Ristolainen, E.; Holloway, P.H.; Lampert, W.V.; Haas, T.W.

Organizations and authors

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Original article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1 Journal article (refereed), original research

Publication channel information

Journal

Journal of Vacuum Science and Technology

Publisher

American Institute of Physics

Volume

A

Issue

12(4)

Pages

1103-1107

Open access

Open access in the publisher’s service

No

Self-archived

No

Other information

Internationality of the publisher

International

Language

English

International co-publication

No

Co-publication with a company

No

The publication is included in the Ministry of Education and Culture’s Publication data collection

Yes

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