Overview of early publications on Atomic Layer Deposition
Year of publication
2014
Authors
Aarik, Jaan; Akbashev, Andrew R.; Cameron, David; Elam, Jeffrey; Elliott, Simon; Gottardi, Gloria; Grigoras, Kestutis; Koshtyal, Yury; Kääriäinen, Marja-Leena; Kääriäinen, Tommi; Malkov, Anatoly; Malygin, Anatoly; Molarius, Jyrki; Nikkola, Juha; Pedersen, Henrik; Puurunen, Riikka L.; Ras, Robin H. A.; Roozeboom, Fred; Savin, Hele; Seidel, Thomas E.
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Publication type
Publication format
Article
Parent publication type
Conference
Article type
Other article
Audience
ScientificPeer-reviewed
Peer-ReviewedMINEDU's publication type classification code
A4 Article in conference proceedingsPublication channel information
Parent publication name
14th International Conference on Atomic Layer Deposition, Kyoto, Japan, June 15-18, 2014
Open access
Open access in the publisher’s service
No
Self-archived
No
Other information
Fields of science
Physical sciences; Chemical sciences; Electronic, automation and communications engineering, electronics; Materials engineering; Nanotechnology; Medical biotechnology
Internationality of the publisher
International
Language
English
International co-publication
Yes
Co-publication with a company
No
The publication is included in the Ministry of Education and Culture’s Publication data collection
Yes