Deposition of cerium dioxide thin films on silicon substrates by atomic layer epitaxy
Year of publication
1994
Authors
Mölsä, H.; Niinistö, L.
Organizations and authors
Publication type
Publication format
Article
Parent publication type
Compilation
Article type
Other article
Audience
ScientificPeer-reviewed
Peer-ReviewedMINEDU's publication type classification code
A3 Book section, Chapters in research booksPublication channel information
Parent publication name
Mater.Res.Soc.Symp.Proc.Vol. 335, Metal-organic chemical vapor deposition of electronic ceramics
Publisher
Material Research Society
Pages
341-350
Open access
Open access in the publisher’s service
No
Self-archived
No
Other information
Internationality of the publisher
International
Language
English
International co-publication
No
Co-publication with a company
No
The publication is included in the Ministry of Education and Culture’s Publication data collection
Yes