He Implantation Induced Nanovoids in Crystalline Si
Year of publication
2009
Authors
Kilpeläinen, Simo; Kuitunen, Kimmo; Slotte, Jonatan; Tuomisto, Filip; Bruno, E.; Mirabella, S.; Priolo, F.
Organizations and authors
Publication type
Publication format
Article
Parent publication type
Journal
Article type
Original article
Audience
ScientificPeer-reviewed
Peer-ReviewedMINEDU's publication type classification code
A1 Journal article (refereed), original researchPublication channel information
Journal/Series
Publisher
Volume
159-160
Pages
164-167
ISSN
Publication forum
Publication forum level
1
Open access
Open access in the publisher’s service
No
Self-archived
No
Other information
Fields of science
Physical sciences; Mechanical engineering; Environmental engineering; Nanotechnology
Keywords
[object Object],[object Object],[object Object]
Internationality of the publisher
International
Language
English
International co-publication
Yes
Co-publication with a company
No
DOI
10.1016/j.mseb.2008.12.010
The publication is included in the Ministry of Education and Culture’s Publication data collection
Yes