Metallic Alloy Seal Bonding
Year of publication
2015
Authors
Reinert, Wolfgang; Kulkarni, Amit; Vuorinen, Vesa; Merz, Peter
Organizations and authors
Aalto University
Vuorinen Vesa 
Publication type
Publication format
Article
Parent publication type
Compilation
Article type
Other article
Audience
ScientificPeer-reviewed
Peer-ReviewedMINEDU's publication type classification code
A3 Book section, Chapters in research booksPublication channel information
Parent publication name
Handbook of Silicon Based MEMS Materials and Technologies Second Edition
Publisher
Pages
626-639
ISBN
Publication forum
Publication forum level
2
Open access
Open access in the publisher’s service
No
Self-archived
No
Other information
Fields of science
Chemical engineering; Materials engineering
Keywords
[object Object],[object Object],[object Object],[object Object],[object Object]
Internationality of the publisher
International
Language
English
International co-publication
Yes
Co-publication with a company
Yes
DOI
10.1016/B978-0-323-29965-7.00032-4
The publication is included in the Ministry of Education and Culture’s Publication data collection
Yes