Filling of Slot Waveguides with Atomic Layer Deposition

Year of publication

2009

Authors

Alasaarela, Tapani; Säynätjoki, Antti; Stenberg, Petri; Kuittinen, Markku; Honkanen, Seppo

Organizations and authors

Aalto University

Publication type

Publication format

Article

Parent publication type

Conference

Article type

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A4 Article in conference proceedings

Publication channel information

Parent publication name

CLEO Europe -EQEC 2009, Munich, Germany, June 14-19 2009

Publisher

European Physical Society (EPS)

Pages

Paper CK10.6

Open access

Open access in the publisher’s service

Self-archived

Other information

Fields of science

Physical sciences; Chemical sciences; Electronic, automation and communications engineering, electronics; Materials engineering; Nanotechnology; Medical biotechnology

Keywords

[object Object],[object Object],[object Object]

Internationality of the publisher

International

Language

English

International co-publication

Co-publication with a company

The publication is included in the Ministry of Education and Culture’s Publication data collection

Yes