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Hybrid microassembly for massively parallel assembly of microchips with water mist

Year of publication

2012

Authors

Chang, Bo; Virta, Antti; Zhou, Quan

Organizations and authors

Aalto University

Zhou Quan Orcid -palvelun logo

Publication type

Publication format

Article

Parent publication type

Conference

Article type

Other article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A4 Article in conference proceedings

Publication channel information

Parent publication name

The Second International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO 2012), Xi'an, China, 29 August 1 September 2012

Publisher

Xi'an Technological University

Pages

6

Open access

Open access in the publisher’s service

No

Self-archived

No

Other information

Keywords

[object Object],[object Object],[object Object],[object Object],[object Object]

Internationality of the publisher

International

Language

English

International co-publication

No

Co-publication with a company

No

DOI

10.1109/3M-NANO.2012.6472937

The publication is included in the Ministry of Education and Culture’s Publication data collection

Yes