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Gas Damping in Vibrating MEMS Structures

Year of publication

2010

Authors

Veijola, Timo

Organizations and authors

Publication type

Publication format

Article

Parent publication type

Compilation

Article type

Other article

Audience

Professional

MINEDU's publication type classification code

D2 Article in a professional research book (incl. an introduction by the editor)

Publication channel information

Publisher

Elsevier

Pages

259-279

Open access

Open access in the publisher’s service

No

Self-archived

No

Other information

Fields of science

Physical sciences; Astronomy and space science; Electronic, automation and communications engineering, electronics; Materials engineering; Nanotechnology; Geosciences

Keywords

[object Object],[object Object],[object Object],[object Object]

Internationality of the publisher

International

Language

English

International co-publication

No

Co-publication with a company

No

The publication is included in the Ministry of Education and Culture’s Publication data collection

Yes