Modeling phosphorus diffusion gettering of iron in single crystal silicon

Year of publication

2009

Authors

Haarahiltunen, Antti; Savin, Hele; Yli-Koski, Marko; Talvitie, Heli; Sinkkonen, Juha

Organizations and authors

Aalto University

Savin Hele

Yli-Koski Marko

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Original article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1 Journal article (refereed), original research

Publication channel information

Journal/Series

Journal of Applied Physics

Publisher

American Institute of Physics

Volume

105

Issue

ISSN

0021-8979

Publication forum

59616

Publication forum level

Open access

Open access in the publisher’s service

Yes

Open access of publication channel

Fully open publication channel

Self-archived

Yes

Other information

Fields of science

Physical sciences; Chemical sciences; Electronic, automation and communications engineering, electronics; Materials engineering; Nanotechnology; Medical biotechnology

Keywords

[object Object],[object Object],[object Object],[object Object]

Internationality of the publisher

International

Language

English

International co-publication

Co-publication with a company

The publication is included in the Ministry of Education and Culture’s Publication data collection

Yes