Atomic layer deposition of HfO2 thin films exploiting novel cyclopentadienyl precursors at high temperatures
Year of publication
2007
Authors
Niinistö, J.; Putkonen, M.; Niinistö, Lauri; Song, F.; Williams, P.; Heys, P.N.; Odedra, R.
Organizations and authors
Publication type
Publication format
Article
Parent publication type
Journal
Article type
Original article
Audience
ScientificPeer-reviewed
Peer-ReviewedMINEDU's publication type classification code
A1 Journal article (refereed), original researchPublication channel information
Journal
Publisher
Volume
19
Issue
13
Pages
3319-3324
ISSN
Publication forum
Publication forum level
3
Open access
Open access in the publisher’s service
No
Self-archived
No
Other information
Internationality of the publisher
International
Language
English
International co-publication
No
Co-publication with a company
No
The publication is included in the Ministry of Education and Culture’s Publication data collection
Yes