White beam synchrotron x-ray topography studies of copper interconnect inducec strain in Si ic processing
Year of publication
2002
Authors
Kanatharana, J.; McNally, P.J.; Tuomi, T.; Toh, B.H.W.; McNeill, D.; Chen, W.M.; Riikonen, J.; Knuuttila, L.; Pérez-Camacho, J.J.
Organizations and authors
Publication type
Publication format
Monograph
Audience
Professional
MINEDU's publication type classification code
D4 Published development or research report or study
Open access
Open access in the publisher’s service
No
Self-archived
No
Other information
Keywords
[object Object],[object Object]
Internationality of the publisher
International
Language
English
International co-publication
No
Co-publication with a company
No
The publication is included in the Ministry of Education and Culture’s Publication data collection
Yes