Optical Coating Fabricated by Atomic Layer Deposition
Year of publication
2008
Authors
Sievilä, Päivi; Chekurov, Nikolai; Kimmelma, Ossi; Tittonen, Ilkka
Organizations and authors
Publication type
Publication format
Article
Parent publication type
Conference
Article type
Other article
Audience
ScientificPeer-reviewed
Peer-ReviewedMINEDU's publication type classification code
A4 Article in conference proceedingsPublication channel information
Parent publication name
The XLII Annual Conference of the Finnish Physical Society, Turku 2008.
Open access
Open access in the publisher’s service
No
Self-archived
No
Other information
Fields of science
Physical sciences; Chemical sciences; Electronic, automation and communications engineering, electronics; Materials engineering; Nanotechnology; Medical biotechnology
Keywords
[object Object],[object Object],[object Object]
Internationality of the publisher
Domestic
Language
English
International co-publication
No
Co-publication with a company
No
The publication is included in the Ministry of Education and Culture’s Publication data collection
Yes