undefined

< Back to search results

Synchrotron X-ray topographic study of strain in silicon wafers with integrated circuits

Year of publication

1997

Authors

Karilahti, M.; Tuomi, T.; Taskinen, M.; Tulkki, J.; Lipsanen, H.; McNally, P.

Organizations and authors

Aalto University

Lipsanen Harri Orcid -palvelun logo

Tulkki Jukka Orcid -palvelun logo

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Original article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1 Journal article (refereed), original research

Publication channel information

Journal

Il Nuovo Cimento

Volume

19

Issue

2

Pages

181-184

Open access

Open access in the publisher’s service

No

Self-archived

No

Other information

Keywords

[object Object],[object Object],[object Object]

Internationality of the publisher

International

Language

English

International co-publication

Yes

Co-publication with a company

No

DOI

10.1007/BF03040971

The publication is included in the Ministry of Education and Culture’s Publication data collection

Yes