Precise chemical analysis developement for Silicon water after rapid thermal processing

Year of publication

2000

Authors

Lioubtchenko, D.; Brianteseva, T.A.; Lebedeva, Z.M.; Markov, I.A.; Nolan, M.; Perova, T.S.; Moore, R.A.

Organizations and authors

Aalto University

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Original article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1 Journal article (refereed), original research

Publication channel information

Journal/Series

Applied Surface Science

Publisher

Elsevier

Issue

156

Pages

21-25

Open access

Open access in the publisher’s service

Self-archived

Other information

Keywords

[object Object],[object Object],[object Object]

Internationality of the publisher

International

Language

English

International co-publication

Co-publication with a company

The publication is included in the Ministry of Education and Culture’s Publication data collection

Yes