Deposition of cerium dioxide thin films on silicon substrates by atomic layer epitaxy
Year of publication
1993
Authors
Mölsä, H.; Niinistö, L.
Organizations and authors
Publication type
Publication format
Article
Parent publication type
Conference
Article type
Other article
Audience
ScientificPeer-reviewed
Peer-ReviewedMINEDU's publication type classification code
A4 Article in conference proceedingsPublication channel information
Parent publication name
Materials Research Society Fall Meeting, Boston, USA, 29.11-3.12.1993
Publisher
MATERIALS RESEARCH SOCIETY
Open access
Open access in the publisher’s service
No
Self-archived
No
Other information
Internationality of the publisher
International
Language
English
International co-publication
No
Co-publication with a company
No
The publication is included in the Ministry of Education and Culture’s Publication data collection
Yes