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Iron segregation in silicon-on-insulator wafer with polysilicon interlayer

Year of publication

2012

Authors

Yli-Koski, Marko; Haarahiltunen, Antti; Hintsala, Jouko; Savin, Hele

Organizations and authors

Aalto University

Savin Hele Orcid -palvelun logo

Yli-Koski Marko Orcid -palvelun logo

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Original article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1 Journal article (refereed), original research

Publication channel information

Journal

PHYSICA STATUS SOLIDI A: APPLICATIONS AND MATERIALS SCIENCE

Publisher

Wiley

Volume

209

Issue

4

Pages

724-726

ISSN

1862-6300

​Publication forum

65010

​Publication forum level

1

Open access

Open access in the publisher’s service

No

Self-archived

No

Other information

Fields of science

Physical sciences; Chemical sciences; Electronic, automation and communications engineering, electronics; Materials engineering; Nanotechnology; Medical biotechnology

Keywords

[object Object],[object Object],[object Object],[object Object]

Internationality of the publisher

International

Language

English

International co-publication

No

Co-publication with a company

No

DOI

10.1002/pssa.201127718

The publication is included in the Ministry of Education and Culture’s Publication data collection

Yes