Advanced cyclopentadienyl precursors for atomic layer deposition of ZrO2 thin films
Year of publication
2008
Authors
Niinistö, Jaakko; Kukli, Kaupo; Tamm, Aile; Putkonen, Matti; Dezelah IV, Charles L.; Niinistö, Lauri; Lu, Jun; Song, Fuquan; Williams, Paul; Heys, Peter N.; Ritala, Mikko; Leskelä, Markku
Organizations and authors
Publication type
Publication format
Article
Parent publication type
Journal
Article type
Original article
Audience
ScientificPeer-reviewed
Peer-ReviewedMINEDU's publication type classification code
A1 Journal article (refereed), original researchPublication channel information
Journal
Publisher
Volume
18
Issue
28
Pages
3385-3390
ISSN
Publication forum
Publication forum level
3
Open access
Open access in the publisher’s service
No
Self-archived
No
Other information
Fields of science
Chemical sciences
Internationality of the publisher
International
Language
English
International co-publication
No
Co-publication with a company
No
The publication is included in the Ministry of Education and Culture’s Publication data collection
Yes