Silicon Slot Waveguides Filled with Atomic Layer Deposition (ALD)

Year of publication

2009

Authors

Honkanen, S.; Tervonen, A.; Säynätjoki, A.; Khanna, A.; Alasaarela, T.

Organizations and authors

Aalto University

Publication type

Publication format

Article

Parent publication type

Conference

Article type

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A4 Article in conference proceedings

Publication channel information

Parent publication name

ICO-Photonics, October 7-9, 2009, Delphi, Greece

Open access

Open access in the publisher’s service

Self-archived

Other information

Fields of science

Physical sciences; Chemical sciences; Electronic, automation and communications engineering, electronics; Materials engineering; Nanotechnology; Medical biotechnology

Keywords

[object Object],[object Object],[object Object]

Internationality of the publisher

International

Language

English

International co-publication

Co-publication with a company

The publication is included in the Ministry of Education and Culture’s Publication data collection

Yes