Deep plasma etching of glass with a silicon shadow mask
Year of publication
2008
Authors
Kolari, Kai
Organizations and authors
VTT Technical Research Centre of Finland Ltd
Kolari Kai
Publication type
Publication format
Article
Parent publication type
Journal
Article type
Original article
Audience
ScientificPeer-reviewed
Peer-ReviewedMINEDU's publication type classification code
A1 Journal article (refereed), original researchPublication channel information
Volume
141
Issue
2
Pages
677-684
ISSN
Publication forum
Publication forum level
2
Open access
Open access in the publisher’s service
No
Self-archived
No
Other information
Keywords
[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]
Language
English
International co-publication
No
Co-publication with a company
No
DOI
10.1016/j.sna.2007.09.005
The publication is included in the Ministry of Education and Culture’s Publication data collection
No