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MEMS on cavity-SOI wafers

Year of publication

2007

Authors

Luoto, Hannu; Henttinen, Kimmo; Suni, Tommi; Dekker, James; Mäkinen, Jari; Torkkeli, Altti

Organizations and authors

VTT Technical Research Centre of Finland Ltd

Dekker James

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Original article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1 Journal article (refereed), original research

Publication channel information

Journal

Solid-State Electronics

Volume

51

Issue

2

Pages

328-332

ISSN

0038-1101

​Publication forum

67380

​Publication forum level

2

Open access

Open access in the publisher’s service

No

Self-archived

No

Other information

Keywords

[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Language

English

International co-publication

No

Co-publication with a company

No

DOI

10.1016/j.sse.2007.01.007

The publication is included in the Ministry of Education and Culture’s Publication data collection

No