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Low-temperature bonding of thick-film polysilicon for microelectromechanical system (MEMS)

Year of publication

2006

Authors

Luoto, Hannu; Suni, Tommi; Kulawski, Martin; Henttinen, Kimmo; Kattelus, Hannu

Organizations and authors

VTT Technical Research Centre of Finland Ltd

Kattelus Hannu

Luoto Hannu

Henttinen Kimmo

Kulawski Martin

Suni Tommi

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Original article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1 Journal article (refereed), original research

Publication channel information

Journal/Series

Microsystem Technologies

Volume

12

Issue

5

Pages

401-405

ISSN

0946-7076

​Publication forum

63348

​Publication forum level

1

Open access

Open access in the publisher’s service

No

Self-archived

No

Other information

Keywords

[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Language

English

International co-publication

No

Co-publication with a company

No

DOI

10.1007/s00542-005-0037-3

The publication is included in the Ministry of Education and Culture’s Publication data collection

No