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Bonded thick film SOI with pre-etched cavities

Year of publication

2006

Authors

Suni, Tommi; Henttinen, Kimmo; Dekker, James; Luoto, Hannu; Kulawski, Martin; Mäkinen, Jari; Mutikainen, Risto

Organizations and authors

VTT Technical Research Centre of Finland Ltd

Dekker James

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Original article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1 Journal article (refereed), original research

Publication channel information

Journal

Microsystem Technologies

Volume

12

Issue

5

Pages

406-412

ISSN

0946-7076

​Publication forum

63348

​Publication forum level

1

Open access

Open access in the publisher’s service

No

Self-archived

No

Other information

Keywords

[object Object],[object Object],[object Object]

Language

English

International co-publication

No

Co-publication with a company

No

DOI

10.1007/s00542-005-0039-1

The publication is included in the Ministry of Education and Culture’s Publication data collection

No