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Stable SOI micromachined electrostatic AC voltage reference

Year of publication

2005

Authors

Kärkkäinen, Anu; Pekko, Panu; Dekker, James; Pesonen, Nadine; Suhonen, Mika; Oja, Aarne; Kyynäräinen, Jukka; Seppä, Heikki

Organizations and authors

VTT Technical Research Centre of Finland Ltd

Kärkkäinen Anu

Seppä Heikki

Dekker James

Kyynäräinen Jukka

Suhonen Mika

Pesonen Nadine

Pekko Panu

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Original article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1 Journal article (refereed), original research

Publication channel information

Journal

Microsystem Technologies

Volume

12

Issue

1-2

Pages

169 - 172

ISSN

0946-7076

​Publication forum

63348

​Publication forum level

1

Open access

Open access in the publisher’s service

No

Self-archived

No

Other information

Keywords

[object Object],[object Object],[object Object]

Language

English

International co-publication

No

Co-publication with a company

No

DOI

10.1007/s00542-005-0005-y

The publication is included in the Ministry of Education and Culture’s Publication data collection

No