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Interfacial reactions in the Si/TaC/Cu system

Year of publication

2004

Authors

Laurila, Tomi; Molarius, Jyrki; Kivilahti, J.K.

Organizations and authors

VTT Technical Research Centre of Finland Ltd

Molarius Jyrki

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Original article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1 Journal article (refereed), original research

Publication channel information

Journal/Series

Microelectronic Engineering

Volume

71

Issue

3-4

Pages

301-309

ISSN

0167-9317

​Publication forum

63335

​Publication forum level

1

Open access

Open access in the publisher’s service

No

Self-archived

No

Other information

Fields of science

Electronic, automation and communications engineering, electronics

Keywords

[object Object],[object Object],[object Object],[object Object],[object Object]

Language

English

International co-publication

No

Co-publication with a company

No

DOI

10.1016/j.mee.2004.02.002

The publication is included in the Ministry of Education and Culture’s Publication data collection

No