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Square-extensional mode single-crystal silicon micromechanical resonator for low-phase-noise oscillator applications

Year of publication

2004

Authors

Kaajakari, Ville; Mattila, Tomi; Oja, Aarne; Kiihamäki, Jyrki; Seppä, Heikki

Organizations and authors

VTT Technical Research Centre of Finland Ltd

Seppä Heikki

Kiihamäki Jyrki Orcid -palvelun logo

Mattila Tomi

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Original article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1 Journal article (refereed), original research

Publication channel information

Journal/Series

IEEE Electron Device Letters

Volume

25

Issue

4

Pages

173 - 175

ISSN

0741-3106

​Publication forum

57393

​Publication forum level

2

Open access

Open access in the publisher’s service

No

Self-archived

Yes

Other information

Keywords

[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Language

English

International co-publication

No

Co-publication with a company

No

DOI

10.1109/LED.2004.824840

The publication is included in the Ministry of Education and Culture’s Publication data collection

No