A batch process to deposit amorphous metallic Mo-Si-N films
Year of publication
2003
Authors
Kattelus, Hannu; Heikkinen, Hannele; Häärä, Ari; Ylönen, Mari; Tolkki,
Organizations and authors
Publication type
Publication format
Article
Parent publication type
Journal
Article type
Original article
Audience
ScientificPeer-reviewed
Peer-ReviewedMINEDU's publication type classification code
A1 Journal article (refereed), original researchPublication channel information
Volume
14
Issue
5-7
Pages
427-430
ISSN
Publication forum
Publication forum level
1
Open access
Open access in the publisher’s service
No
Self-archived
No
Other information
Keywords
[object Object]
Language
English
International co-publication
No
Co-publication with a company
No
DOI
10.1023/A:1023925423733
The publication is included in the Ministry of Education and Culture’s Publication data collection
No