Nanoimprint lithography: An alternative nanofabrication approach
Year of publication
2003
Authors
Sotomayor Torres, C.M.; Zankovych, S.; Seekamp, J.; Kam, A.P.; Cedeño, C. Clavijo; Hoffmann, T.; Ahopelto, Jouni; Reuther, F.; Pfeiffer, K.; Bleidiessel, G.; Gruetzner, G.; Maximov, M.V.; Heidari, B.
Organizations and authors
VTT Technical Research Centre of Finland Ltd
Ahopelto Jouni
Publication type
Publication format
Article
Parent publication type
Journal
Article type
Original article
Audience
ScientificPeer-reviewed
Peer-ReviewedMINEDU's publication type classification code
A1 Journal article (refereed), original researchPublication channel information
Volume
23
Issue
1-2
Pages
23-31
ISSN
Publication forum
Publication forum level
1
Open access
Open access in the publisher’s service
No
Self-archived
No
Other information
Fields of science
Nanotechnology
Keywords
[object Object],[object Object],[object Object],[object Object]
Language
English
International co-publication
Yes
Co-publication with a company
Yes
DOI
10.1016/S0928-4931(02)00221-7
The publication is included in the Ministry of Education and Culture’s Publication data collection
No