New polymer materials for nanoimprinting

Year of publication

2000

Authors

Schulz, H.; Scheer, H.-C.; Hoffmann, T.; Sotomayor-Torres, C.; Pfeiffer, Karl; Bleidiessel, G.; Grutzner, G.; Cardinaud, C.; Gaboriau, F.; Peignon, M.-C.; Ahopelto, Jouni; Heidari, B.

Organizations and authors

VTT Technical Research Centre of Finland Ltd

Ahopelto Jouni

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Original article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1 Journal article (refereed), original research

Publication channel information

Journal/Series

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volume

Issue

Pages

1861 - 1865

ISSN

1071-1023

Open access

Open access in the publisher’s service

Self-archived

Other information

Language

English

International co-publication

Co-publication with a company

DOI

10.1116/1.1305331