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Mechanically induced Si layer transfer in hydrogen-implanted Si wafers

Year of publication

2000

Authors

Henttinen, Kimmo; Suni, Ilkka; Lau, Silvanus

Organizations and authors

VTT Technical Research Centre of Finland Ltd

Suni Ilkka

Henttinen Kimmo

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Original article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1 Journal article (refereed), original research

Publication channel information

Journal/Series

Applied Physics Letters

Volume

76

Issue

17

Pages

2370-2372

ISSN

0003-6951

​Publication forum

51518

​Publication forum level

2

Open access

Open access in the publisher’s service

No

Self-archived

No

Other information

Language

English

International co-publication

No

Co-publication with a company

No

DOI

10.1063/1.126349

The publication is included in the Ministry of Education and Culture’s Publication data collection

No