Optical and mechanical properties of nanolaminates of zirconium and hafnium oxides grown by atomic layer deposition

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Optical and mechanical properties of nanolaminates of zirconium and hafnium oxides grown by atomic layer deposition

Year of publication

2020

Publication type

A1 Journal article –refereed

Authors

Jogiaas, Taivo; Kull, Mikk; Seemen, Helina; Ritslaid, Peeter; Kukli, Kaupo; Tamm, Aile

Organizations and authors

Issue

2

​Publication forum

62085

​Publication forum level

1

Other information

Fields of science

Nano-technology; Chemical sciences

Open access

No

Publication country

United States, USA

Language

English

International co-publication

Yes

Co-publication with a company

No