Optical and mechanical properties of nanolaminates of zirconium and hafnium oxides grown by atomic layer deposition
Year of publication
2020
Authors
Jogiaas, Taivo; Kull, Mikk; Seemen, Helina; Ritslaid, Peeter; Kukli, Kaupo; Tamm, Aile
Organizations and authors
University of Helsinki
Kukli Kaupo
Publication type
Publication format
Article
Parent publication type
Journal
Article type
Original article
Audience
ScientificPeer-reviewed
Peer-ReviewedMINEDU's publication type classification code
A1 Journal article (refereed), original researchPublication channel information
Parent publication name
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume
38
Issue
2
ISSN
Publication forum
Publication forum level
1
Open access
Open access in the publisher’s service
Yes
Open access of publication channel
Partially open publication channel
License of the publisher’s version
CC BY
Self-archived
Yes
License of the self-archived publication
CC BY
Other information
Fields of science
Chemical sciences; Nanotechnology
Keywords
[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]
Publication country
United States
Internationality of the publisher
International
Language
English
International co-publication
Yes
Co-publication with a company
No
DOI
10.1116/1.5131563
The publication is included in the Ministry of Education and Culture’s Publication data collection
Yes