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Silicon oxide-niobium oxide mixture films and nanolaminates grown by atomic layer deposition from niobium pentaethoxide and hexakis(ethylamino) disilane

Year of publication

2020

Authors

Kukli, Kaupo; Kemell, Marianna; Heikkilä, Mikko J.; Castan, Helena; Duenas, Salvador; Mizohata, Kenichiro; Ritala, Mikko; Leskelä, Markku

Organizations and authors

University of Helsinki

Kukli Kaupo

Mizohata Kenichiro

Kemell Marianna

Leskelä Markku

Ritala Mikko

Heikkilä Mikko J.

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Original article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1 Journal article (refereed), original research

Publication channel information

Journal

Nanotechnology

Parent publication name

Nanotechnology

Volume

31

Issue

19

Article number

195713

ISSN

0957-4484

​Publication forum

63717

​Publication forum level

2

Open access

Open access in the publisher’s service

No

Self-archived

Yes

Other information

Fields of science

Chemical sciences; Nanotechnology

Keywords

[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Publication country

United Kingdom

Internationality of the publisher

International

Language

English

International co-publication

Yes

Co-publication with a company

No

DOI

10.1088/1361-6528/ab6fd6

The publication is included in the Ministry of Education and Culture’s Publication data collection

Yes