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Amorphous silicon waveguide escalator: Monolithic integration of active components on 3 µm SOI platform

Year of publication

2020

Authors

Bera, Arijit; Cherchi, Matteo; Tappura, Kirsi; Heimala, Päivi; Aalto, Timo

Organizations and authors

VTT Technical Research Centre of Finland Ltd

Bera Arijit

Tappura Kirsi Orcid -palvelun logo

Cherchi Matteo Orcid -palvelun logo

Heimala Päivi Orcid -palvelun logo

Aalto Timo Orcid -palvelun logo

Publication type

Publication format

Article

Parent publication type

Conference

Article type

Other article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A4 Article in conference proceedings

Publication channel information

Journal

Proceedings of SPIE

Parent publication name

Silicon Photonics XV

Parent publication editors

Reed, Graham T.; Knights, Andrew P.

Conference

Silicon Photonics XV 2020

Publisher

International Society for Optics and Photonics SPIE

Volume

11285

Article number

1128507

ISSN

0277-786X

ISBN

978-1-5106-3333-9

​Publication forum

71479

​Publication forum level

0

Open access

Open access in the publisher’s service

No

Self-archived

No

Other information

Fields of science

Computer and information sciences; Physical sciences; Electronic, automation and communications engineering, electronics

Keywords

[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Language

English

International co-publication

No

Co-publication with a company

No

DOI

10.1117/12.2544311

The publication is included in the Ministry of Education and Culture’s Publication data collection

Yes