Area-Selective Molecular Layer Deposition of Polyimide on Cu through Cu-Catalyzed Formation of a Crystalline Interchain Polyimide

Year of publication

2020

Authors

Zhang, Chao; Vehkamäki, Marko; Pietikäinen, Mika; Leskelä, Markku; Ritala, Mikko

Organizations and authors

University of Helsinki

Zhang Chao

Leskelä Markku

Vehkamäki Marko

Ritala Mikko

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Original article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1 Journal article (refereed), original research

Publication channel information

Journal/Series

Chemistry of Materials

Parent publication name

Chemistry of Materials

Volume

Issue

Pages

5073-5083

ISSN

0897-4756

Publication forum

53342

Publication forum level

Open access

Open access in the publisher’s service

Yes

Open access of publication channel

Partially open publication channel

License of the publisher’s version

CC BY

Self-archived

Yes

License of the self-archived publication

CC BY

Other information

Fields of science

Chemical sciences

Keywords

[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Publication country

United States

Internationality of the publisher

International

Language

English

International co-publication

Co-publication with a company

DOI

10.1021/acs.chemmater.0c00898

The publication is included in the Ministry of Education and Culture’s Publication data collection

Yes