(Semi-)transparent ALD TiN microelectrodes
Year of publication
2018
Authors
Ryynänen, Tomi; Pelkonen, Anssi; Grigoras, Kestutis; Ylivaara, Oili; Ahopelto, Jouni; Prunnila, Mika; Narkilahti, Susanna; Lekkala, Jukka
Organizations and authors
VTT Technical Research Centre of Finland Ltd
Ahopelto Jouni
Grigoras Kestutis
Prunnila Mika
Ylivaara Oili 
Publication type
Publication format
Poster
Parent publication type
Conference
Audience
Scientific
Publication channel information
Parent publication name
11th International Meeting on Substrate Integrated Microelectrode Arrays, MEA Meeting 2018
Conference
11th International Meeting on Substrate Integrated Microelectrode Arrays, MEA Meeting 2018
Open access
Open access in the publisher’s service
Yes
Self-archived
No
Other information
Fields of science
Physical sciences; Electronic, automation and communications engineering, electronics
Keywords
[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]
Language
English
International co-publication
No
Co-publication with a company
No
DOI
10.3389/conf.fncel.2018.38.00111
The publication is included in the Ministry of Education and Culture’s Publication data collection
No