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Atomic Layer Deposition of Insulating AlF3/Polyimide Nanolaminate Films

Year of publication

2021

Authors

Li, Xinzhi; Vehkamaki, Marko; Heikkila, Mikko; Mattinen, Miika; Putkonen, Matti; Leskela, Markku; Ritala, Mikko

Organizations and authors

University of Helsinki

Leskela Markku

Vehkamaki Marko

Putkonen Matti

Mattinen Miika

Heikkila Mikko

Ritala Mikko

Li Xinzhi

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Original article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1 Journal article (refereed), original research

Publication channel information

Journal

Coatings

Parent publication name

Coatings

Volume

11

Issue

3

Article number

355

​Publication forum

70239

​Publication forum level

1

Open access

Open access in the publisher’s service

Yes

Open access of publication channel

Fully open publication channel

Self-archived

Yes

License of the self-archived publication

CC BY

Other information

Fields of science

Nanotechnology

Keywords

[object Object],[object Object],[object Object],[object Object]

Publication country

Switzerland

Internationality of the publisher

International

Language

English

International co-publication

Yes

Co-publication with a company

No

DOI

10.3390/coatings11030355

The publication is included in the Ministry of Education and Culture’s Publication data collection

Yes