Green Lithography for Delicate Materials

Year of publication

2021

Authors

Grebenko, Artem; Bubis, Anton; Motovilov, Konstantin; Dremov, Viacheslav; Korostylev, Evgeny; Kindiak, Ivan; Fedorov, Fedor S.; Luchkin, Sergey; Zhuikova, Yuliya; Trofimenko, Aleksandr; Filkov, Gleb; Sviridov, Georgiy; Ivanov, Andrey; Dull, Jordan T.; Mozhchil, Rais; Ionov, Andrey; Varlamov, Valery; Rand, Barry P.; Podzorov, Vitaly; Nasibulin, Albert G.

Organizations and authors

Aalto University

Nasibulin Albert

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Original article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1 Journal article (refereed), original research

Publication channel information

Journal/Series

Advanced Functional Materials

Publisher

Wiley

Volume

Issue

Article number

2101533

ISSN

1616-301X

Publication forum

50432

Publication forum level

Open access

Open access in the publisher’s service

Self-archived

Yes

Other information

Fields of science

Materials engineering; Nanotechnology

Keywords

[object Object],[object Object],[object Object],[object Object]

Internationality of the publisher

International

Language

English

International co-publication

Yes

Co-publication with a company

DOI

10.1002/adfm.202101533

The publication is included in the Ministry of Education and Culture’s Publication data collection

Yes