Residual stress in thin films made by atomic layer deposition
Year of publication
2016
Authors
Ylivaara, Oili; Puurunen, Riikka
Organizations and authors
Publication type
Publication format
Poster
Parent publication type
Conference
Audience
Scientific
Publication channel information
Parent publication name
Conference
HERALD WG2 Workshop & 4th Annual Seminar of Finnish Center of Excellence in Atomic Layer Deposition (ALDCoE)
Open access
Open access in the publisher’s service
No
Self-archived
No
Other information
Fields of science
Electronic, automation and communications engineering, electronics; Materials engineering
Keywords
[object Object],[object Object],[object Object]
Language
English
International co-publication
No
Co-publication with a company
No
The publication is included in the Ministry of Education and Culture’s Publication data collection
No