Atomic layer deposition of titanium nitride layer on porous silicon supercapacitor electrodes
Year of publication
2014
Authors
Grigoras, Kestutis; Keskinen, J.; Yli-Rantala, Elina; Laakso, S.; Välimäki, H.; Kauranen, P.; Ahopelto, Jouni; Prunnila, Mika
Organizations and authors
Publication type
Publication format
Poster
Parent publication type
Conference
Audience
Scientific
Publication channel information
Parent publication name
14th International Conference on Atomic Layer Deposition, ALD 2014
Conference
14th International Conference on Atomic Layer Deposition, ALD 2014
Open access
Open access in the publisher’s service
No
Self-archived
No
Other information
Keywords
[object Object],[object Object],[object Object]
Language
English
International co-publication
No
Co-publication with a company
No
The publication is included in the Ministry of Education and Culture’s Publication data collection
No