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Sputtered W-N diffusion barriers

Year of publication

1985

Authors

Kattelus, Hannu; Kolawa, Elzbieta; Affolter, Klaus; Nicolet, Marc

Organizations and authors

VTT Technical Research Centre of Finland Ltd

Kattelus Hannu

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Original article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1 Journal article (refereed), original research

Publication channel information

Journal/Series

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volume

3

Issue

6

Pages

2246-2254

ISSN

Publication forum

Publication forum level

1

Open access

Open access in the publisher’s service

No

Self-archived

Yes

Other information

Fields of science

Physical sciences

Language

English

International co-publication

Yes

Co-publication with a company

No

DOI

10.1116/1.572901

The publication is included in the Ministry of Education and Culture’s Publication data collection

No