Ultrathin MEMS pressure sensor and readout ASIC
Year of publication
2017
Authors
Saarilahti, Jaakko; Gomes Martins, David; Kärkkäinen, Anu; Feng, Gao; Kyynäräinen, Jukka; Kuisma, Heikki
Organizations and authors
VTT Technical Research Centre of Finland Ltd
Kärkkäinen Anu
Gomes Martins David
Feng Gao
Saarilahti Jaakko
Kyynäräinen Jukka
Publication type
Publication format
Abstract
Parent publication type
Conference
Audience
Scientific
Publication channel information
Parent publication name
DMD Europe 2017: Micro-fabrication for medical devices: Abstracts and program
Conference
Design of Medical Devices Conference, DMD Europe 2017, Micro-fabrication for medical devices
Publisher
Delft Technical University
Pages
33
Open access
Open access in the publisher’s service
No
Self-archived
No
Other information
Fields of science
Electronic, automation and communications engineering, electronics
Keywords
[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]
Language
English
International co-publication
No
Co-publication with a company
Yes
The publication is included in the Ministry of Education and Culture’s Publication data collection
No