Side-wall spacer passivated sub-μm Josephson junction fabrication process
Year of publication
2017
Authors
Grönberg, Leif; Kiviranta, Mikko; Vesterinen, Visa; Lehtinen, Janne; Simbierowicz, Slawomir; Luomahaara, Juho; Prunnila, Mika; Hassel, Juha
Organizations and authors
VTT Technical Research Centre of Finland Ltd
Lehtinen Janne 
Hassel Juha
Luomahaara Juho
Grönberg Leif
Prunnila Mika
Kiviranta Mikko
Simbierowicz Slawomir
Vesterinen Visa
Publication type
Publication format
Article
Parent publication type
Journal
Article type
Original article
Audience
ScientificPeer-reviewed
Peer-ReviewedMINEDU's publication type classification code
A1 Journal article (refereed), original researchPublication channel information
Volume
30
Issue
12
Article number
125016
ISSN
Publication forum
Publication forum level
1
Open access
Open access in the publisher’s service
Yes
Open access of publication channel
Partially open publication channel
Self-archived
No
Other information
Fields of science
Physical sciences; Electronic, automation and communications engineering, electronics; Materials engineering
Keywords
[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]
Language
English
International co-publication
No
Co-publication with a company
No
DOI
10.1088/1361-6668/aa9411
The publication is included in the Ministry of Education and Culture’s Publication data collection
Yes