undefined

< Back to search results

Biocompatible ALD barrier coatings for medical devices

Year of publication

2017

Authors

Matvejeff, Mikko; Ek, Satu; Ritasalo, Riina; Kalliomäki, Jesse; Järvinen, Päivi; Ylivaara, Oili; Östreng, Erik

Organizations and authors

VTT Technical Research Centre of Finland Ltd

Ylivaara Oili Orcid -palvelun logo

Publication type

Publication format

Article

Parent publication type

Conference

Article type

Other article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A4 Article in conference proceedings

Publication channel information

Parent publication name

Proceedings of 2017 IEEE Electron Devices Technology and Manufacturing Conference (EDTM)

Conference

Electron Devices Technology and Manufacturing Coneference, EDTM 2017

Publisher

IEEE Institute of Electrical and Electronic Engineers

Article number

7947504

Pages

56-58

ISBN

978-1-5090-4660-7

​Publication forum

5475

​Publication forum level

1

Open access

Open access in the publisher’s service

No

Self-archived

No

Other information

Fields of science

Materials engineering

Keywords

[object Object],[object Object],[object Object],[object Object]

Language

English

International co-publication

No

Co-publication with a company

Yes

DOI

10.1109/EDTM.2017.7947504

The publication is included in the Ministry of Education and Culture’s Publication data collection

Yes