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Thermoelectric bolometers based on silicon membranes

Year of publication

2017

Authors

Varpula, Aapo; Timofeev, Andrey V.; Shchepetov, Andrey; Grigoras, Kestutis; Ahopelto, Jouni; Prunnila, Mika

Organizations and authors

VTT Technical Research Centre of Finland Ltd

Varpula Aapo Orcid -palvelun logo

Shchepetov Andrey

Timofeev Andrey V.

Ahopelto Jouni

Grigoras Kestutis

Prunnila Mika

Publication type

Publication format

Article

Parent publication type

Conference

Article type

Other article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A4 Article in conference proceedings

Publication channel information

Journal/Series

Proceedings of SPIE

Parent publication name

Smart Sensors, Actuators, and MEMS VIII

Conference

Smart Sensors, Actuators, and MEMS VIII

Publisher

International Society for Optics and Photonics SPIE

Volume

10246

Article number

102460L

ISSN

0277-786X

ISBN

978-1-5106-0993-8

​Publication forum

71479

​Publication forum level

0

Open access

Open access in the publisher’s service

No

Self-archived

No

Other information

Fields of science

Electronic, automation and communications engineering, electronics; Materials engineering

Keywords

[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Language

English

International co-publication

No

Co-publication with a company

No

DOI

10.1117/12.2266554

The publication is included in the Ministry of Education and Culture’s Publication data collection

Yes