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MOEMS FPI sensors for NIR-MIR microspectrometer applications

Year of publication

2016

Authors

Akujärvi, Altti; Guo, Bin; Mannila, Rami; Rissanen, Anna

Organizations and authors

VTT Technical Research Centre of Finland Ltd

Akujärvi Altti

Rissanen Anna

Guo Bin

Mannila Rami

Publication type

Publication format

Article

Parent publication type

Conference

Article type

Other article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A4 Article in conference proceedings

Publication channel information

Journal

Proceedings of SPIE

Parent publication name

MOEMS and Miniaturized Systems XV

Parent publication editors

Piyawattanametha, Wibool; Park, Yong-Hwa

Conference

MOEMS and Miniaturized Systems XV

Publisher

International Society for Optics and Photonics SPIE

Volume

9760

Article number

97600M

ISSN

0277-786X

ISBN

978-1-62841-995-5

​Publication forum

71479

​Publication forum level

0

Open access

Open access in the publisher’s service

No

Self-archived

No

Other information

Fields of science

Electronic, automation and communications engineering, electronics

Keywords

[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Language

English

International co-publication

No

Co-publication with a company

No

DOI

10.1117/12.2214710

The publication is included in the Ministry of Education and Culture’s Publication data collection

Yes