undefined

< Back to search results

Microscopic silicon-based lateral high-aspect-ratio structures for thin film conformality analysis

Year of publication

2015

Authors

Gao, Feng; Arpiainen, Sanna; Puurunen, Riikka L.

Organizations and authors

VTT Technical Research Centre of Finland Ltd

Gao Feng

Puurunen Riikka L.

Arpiainen Sanna

Publication type

Publication format

Article

Parent publication type

Journal

Article type

Original article

Audience

Scientific

Peer-reviewed

Peer-Reviewed

MINEDU's publication type classification code

A1 Journal article (refereed), original research

Publication channel information

Journal

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volume

33

Issue

1

Article number

010601

ISSN

0734-2101

​Publication forum

62085

​Publication forum level

1

Open access

Open access in the publisher’s service

No

Self-archived

Yes

Other information

Fields of science

Materials engineering; Nanotechnology

Keywords

[object Object],[object Object],[object Object],[object Object]

Language

English

International co-publication

No

Co-publication with a company

No

DOI

10.1116/1.4903941

The publication is included in the Ministry of Education and Culture’s Publication data collection

Yes