Scatterometric characterization of diffractive optical elements
Year of publication
2014
Authors
Saastamoinen, Toni; Husu, Hannu; Laukkanen, Janne; Siitonen, Samuli; Turunen, Jari; Lassila, Antti
Organizations and authors
VTT Technical Research Centre of Finland Ltd
Lassila Antti 
Publication type
Publication format
Article
Parent publication type
Conference
Article type
Other article
Audience
ScientificPeer-reviewed
Peer-ReviewedMINEDU's publication type classification code
A4 Article in conference proceedingsPublication channel information
Journal/Series
Parent publication name
Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII
Conference
Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII
Volume
9173
Article number
91730I
ISSN
ISBN
Publication forum
Publication forum level
1
Open access
Open access in the publisher’s service
No
Self-archived
No
Other information
Fields of science
Physical sciences; Electronic, automation and communications engineering, electronics
Keywords
[object Object],[object Object]
Language
English
International co-publication
No
Co-publication with a company
Yes
DOI
10.1117/12.2061699
The publication is included in the Ministry of Education and Culture’s Publication data collection
Yes